The PLD for large-size wafers can replace existing technologies and touch the previously inaccessible material domains due to its faster exploration of new material processing techniques, wider range of materials, higher crystallinity, and greater doping adjustability. Small targets and clusters allow for cost savings when ensuring high-quality epitaxial film preparation, facilitating research and material growth in various fields such as semiconductor films, new energy, mechanical coatings, optics, and aerospace. We can support customized deposition solutions for ultra-long strip films, such as manufacturing high-temperature superconducting cables.

Specifications