描述

Physical vapor deposition (PVD)

time:2021-10-23

Physical vapor deposition (PVD) is a thin film deposition process in which atoms or molecules of a material are vaporized from a solid source in high vacuum and condense on a substrate. ... PVD is used to deposit films ranging from of a few angstroms to thousands of angstroms in thickness.

小型脉冲激光沉积系统 QME-PLD